高加速CD-SEMによる深穴・深溝の3次元形状推定モデルの検証 (英語)
Deep learning model for 3D profiling of HAR features using high-voltage CD-SEM
3D devices require 3D metrology
The growing need for 5G connectivity, Internet of Things (IoT), and big data is driving new growth in the semiconductor industry as the capability to store and process more data requires...